【题目】使用PTFE膜过滤器和低脉动波纹管泵减少高温硫酸中的颗粒

【作者】Tomoyuki Takakura*, Katsuhiko Tokuno  and Shuichi Tsuzuki

【摘要】为了减少用于半导体晶圆清洗过程的化学品中的颗粒，通过过滤技术去除产生的颗粒以及减少清洗工具的每个部分的颗粒产生是很重要的。我们将一种新开发的低脉动波纹管泵应用于90°C硫酸中，评估了脉动对泵下游颗粒水平的影响，以及5nm额定聚四氟乙烯膜过滤器的颗粒去除效率。比较了常规波纹管泵和低脉动泵的压力脉动行为，证实了低脉动泵有效地降低了压力波动的峰间峰值。此外，与常规泵相比，低脉动泵的泵下游颗粒水平大幅降低。另一方面，颗粒挑战试验的结果表明，无论使用什么泵，过滤器的颗粒去除效率都没有变化。因此，与使用低脉动泵相比，过滤器下游的颗粒水平更低。综上所述，低脉动泵和5nm额定聚四氟乙烯膜过滤器是一种很好的组合，可以有效地减少90°C硫酸中的颗粒。

【关键词】过滤器，颗粒去除效率，波纹管泵，脉动，硫酸

[Title] Particle reduction in high temperature sulfuric acid  using PTFE membrane filter and low pulsation  bellows pump

[Abstract] In order to reduce particles in the chemicals used  for the semiconductor wafer cleaning processes, it is important to  remove generated particles by filtration technology as well as to  reduce particle generation from each part of the cleaning tool.  We applied a newly developed bellows pump with low pulsation  to 90 °C sulfuric acid, and evaluated the effect of the pulsation on  the particle level downstream of the pump and particle removal  efficiency of 5 nm-rated PTFE membrane filters in the chemical.  Pressure pulsation behavior was compared between a  conventional bellows pump and the low pulsation pump, and it  was confirmed that the low pulsation pump effectively reduced  the peak-to-peak value of pressure fluctuation. In addition, the  particle level downstream of the pump drastically decreased for  the low pulsation pump compared to the conventional pump. On  the other hand, the results of particle challenge tests indicated  that the filters’ particle removal efficiency was unchanged  regardless of the pump used. As a result, the particle level  downstream of the filter when using the low pulsation pump  became lower compared to that using the conventional pump. In  conclusion, the low pulsation pump and the 5 nm-rated PTFE  membrane filter are a good combination to effectively reduce  particles in 90 °C sulfuric acid.

[Keywords] filter, particle removal efficiency, bellows pump,  pulsation, sulfuric acid

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