【题目】压电器件隔膜微型泵的研制与应用

【作者】H.K. Ma1 , B. R. Hou1 , H. Y. Wu1 , C.Y. Lin1 , J. J. Gao1 , M.C. Kou2

【摘要】本研究成功开发了一种新型薄、紧凑、轻的隔膜微型泵，通过隔膜振动驱动液体。微隔膜泵采用铝制高精度数控机床制造，截面尺寸为5mm×28mm。阀门和隔膜均由PDMS制造。压电装置的振动振幅产生一个振荡流，该振荡流可以通过改变膜片的曲率来改变腔室的体积。设计并实现了单个微隔膜泵、等温流开放系统和封闭液体冷却系统的性能试验实验装置。受止回阀、隔膜、压电装置、电压室容积、输入电压和频率的设计影响。在本设计的工作频率70-180 Hz范围内，在总泵头为零时，测量的最大流量为72 ml/min。

[Title] DEVELOPMENT AND APPLICATION OF A DIAPHRAGM MICRO-PUMP WITH  PIEZOELECTRIC DEVICE

[Authors] H.K. Ma1 , B. R. Hou1 , H. Y. Wu1 , C.Y. Lin1 , J. J. Gao1 , M.C. Kou2

[Abstract] In this study, a new type of thin, compact, and light  weighed diaphragm micro-pump has been successfully  developed to actuate the liquid by the vibration of a  diaphragm. The micro-diaphragm pump with two valves  is fabricated in an aluminum case by using highly  accurate CNC machine, and the cross-section dimension  is 5mm×28mm. Both valves and diaphragm are  manufactured from PDMS. The amplitude of vibration  by a piezoelectric device produces an oscillating flow  which may change the chamber volume by changing the  curvature of a diaphragm. Several experimental set-ups  for performance test in a single micro-diaphragm pump,  isothermal flow open system, and a closed liquid cooling  system is designed and implemented. The performance of  one-side actuating micro-diaphragm pump is affected by  the design of check valves, diaphragm, piezoelectric  device, chamber volume, input voltage and frequency.  The measured maximum flow rate of present design is 72  ml/min at zero total pump head in the range of operation  frequency 70-180 Hz.