[题名] 全氟烷氧基烷烃弹簧动态特性研究

[作者] Jing Ni , Yujie Feng, Zhi Cui , Lihua He  and Jingbo Sun

[摘要] 半导体清洗系统超清洁流量控制泵是半导体行业的关键设备。其中，全氟烷氧基烷烃（PFA）弹簧是控制泵的关键部件，其动态性能是保证系统高效运行的关键。然而，弹簧的动态性能往往受到工作频率的影响。本文通过单轴正弦激励下的压缩循环实验，研究了不同工作频率对弹簧动态特性的影响。拟合了不同压缩频率下的力-位移曲线，得到了PFA弹簧在不同循环加载频率下的动态刚度。利用不同循环加载条件下的滞后曲线，计算了弹簧滞结果表明，随着频率的增加，弹簧的动态刚度增大。后系数的变化。经过200万次压缩实验，研究了动态刚度、迟滞系数和弹簧高度的变化。

[关键词] PFA弹簧、动态特性、频率、动态刚度、延性系数

[Title] Research on the Dynamic Characteristics of Perfluoroalkoxy Alkane Springs

[Author] Jing Ni , Yujie Feng, Zhi Cui , Lihua He and Jingbo Sun

[Abstract] Semiconductor cleaning system ultra-clean flow control pumps are critical equipment in the semiconductor industry. Among them, the perfluoroalkoxy alkane (PFA) spring is a pivotal component to control the pump, and its dynamic performance is crucial to ensure the efficient operation of the system. However, the dynamic performance of the spring is often affected by the operating frequency. This paper studied the effect of different working frequencies on the dynamic property of the spring through compression-cycle experiments under uniaxial sinusoidal excitation. The force–displacement curves under different compression frequencies were fitted to obtain the dynamic stiffness of the PFA spring under different cyclic loading frequencies. The variation in the spring’s hysteresis coefficient was evaluated using the hysteresis curves of different cyclic loading conditions. After 2 million compression experiments, the changes in dynamic stiffness, hysteresis coefficient, and spring height were investigated. The obtained results revealed that, as the frequency increases, the dynamic stiffness of the spring increases. The hysteresis coefficient of the PFA spring is the largest at 10 Hz and the smallest at 6 Hz. Upon conducting 2 million compression tests, it was discovered that the dynamic stiffness experiences the greatest attenuation rate of 4.19% at a frequency of 8 Hz, whereas the hysteresis coefficient undergoes the largest attenuation of 42.1% at a frequency of 6 Hz. The results will help to improve the design and application level of PFA springs.

[Keywords] PFA spring; dynamic properties; frequency; dynamic stiffness; ductility coefficient